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NIST develops test method for key micromechanical property

Engineers and researchers designing and building new microelectromechanical systems can benefit from a new test method developed at the National Institute of Standards and Technology to measure a key mechanical property of such systems: elasticity. The new method determines the "Young's modulus" of thin films not only for MEMS devices but also for semiconductor devices in integrated circuits.

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Keywords: nist, develops, test, method, key, micromechanical, property, develop

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